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This book covers the recent development of cutting-edge micro/nano electrometers, and discusses the technological challenges for practical implementation. Detection of electrostatic charge has a wide range of usage in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro/nano electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues in micro/nano-scales. The remarkable dynamic features of microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS), and advances in solid-state electronics hold much potential for the design and fabrication of extremely sensitive charge sensors.
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