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Flash Lamp Annealing

Name: Flash Lamp Annealing
Brand: Springer Nature Switzerland AG
SKU: 33089429
Price: 140.95 EUR
Availability: InStock
Author: Lars Rebohle
ISBN: 9783030233013

Lars Rebohle

Denise Reichel

Language

English

Book Paperback

Libristo code: 33089429

Publishers Springer Nature Switzerland AG, August 2020

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for therma... Full description

Libristo code: 33089429

341 b

140.95 €

275.68 лв

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This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.