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Gate Stack and Silicide Issues in Silicon Processing: Volume 611

Name: Gate Stack and Silicide Issues in Silicon Processing: Volume 611
Brand: Materials Research Society
SKU: 02060247
Price: 37.37 EUR
Availability: InStock
Author: L. A. ClevengerS. A. CampbellP. R. BesserS. B. Herner
ISBN: 9781558995192

L. A. ClevengerS. A. CampbellP. R. BesserS. B. Herner

Language

English

Book Hardback

Libristo code: 02060247

Publishers Materials Research Society, March 2001

As the feature size of microelectronic devices approaches the deep submicron regime, the process dev... Full description

Libristo code: 02060247

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37.37 €

73.08 лв

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As the feature size of microelectronic devices approaches the deep submicron regime, the process development and integration issues related to gate stack and silicide processing are key challenges. Gate leakage is rising due to direct tunneling. Power and reliability concerns are expected to limit the ultimate scaling of SiO2-based insulators to about 1.5nm. Gate insulators must not deleteriously affect the interface quality, thermal stability, charge trapping, or process integration. Metal gate materials and damascene gates are being investigated, in conjunction with the application of a high-permittivity gate insulator, to provide sufficient device performance at ULSI dimensions. The silicidation process is also coming under pressure. Narrow device widths and decreasing junction depths are making the formation of low-leakage, low-resistance silicide straps extremely difficult. Producing shallower junctions via ion implantation is inhibited by transient enhanced diffusion and low beam currents at low implantation energies. Gate stack and contact film effects, such as point defect injection, extended defect formation, and stress on ultrashallow junction formation must be considered.

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About the book

Full name Gate Stack and Silicide Issues in Silicon Processing: Volume 611

Author L. A. ClevengerS. A. CampbellP. R. BesserS. B. Herner

Language

English

Binding Book - Hardback

Date of issue 2001

Number of pages 256

EAN 9781558995192

ISBN 1558995196

Libristo code 02060247

Publishers Materials Research Society

Weight 51

Dimensions 152 x 229 x 16

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