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High Resolution Focused Ion Beams: FIB and its Applications

Name: High Resolution Focused Ion Beams: FIB and its Applications
Brand: Springer, Berlin
SKU: 01379513
Price: 235.85 EUR
Availability: InStock
Author: Jon Orloff
ISBN: 9780306473500

The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

Jon Orloff

Lynwood Swanson

Mark Utlaut

Language

English

Book Hardback

Libristo code: 01379513

Publishers Springer, Berlin, November 2001

In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) t... Full description

Libristo code: 01379513

577 b

235.85 €

461.28 лв

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In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.