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Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications

Name: Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications
Brand: Springer, Berlin
SKU: 48233588
Price: 163.78 EUR
Availability: InStock
Author: Kamaljeet Singh
ISBN: 9789819661619

Kamaljeet Singh

Ayan Karmakar

Language

English

Book Hardback

Libristo code: 48233588

Publishers Springer, Berlin, November 2024

This book details simple methodology for the realization of the practical micro devices employed in... Full description

Libristo code: 48233588

398 b

163.78 €

320.33 лв

In stock at our supplier Shipping in 10-13 days

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This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.