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Simulation of Deposition Processes with PECVD Apparatus

Language EnglishEnglish
Book Hardback
Book Simulation of Deposition Processes with PECVD Apparatus Meraa Arab
Libristo code: 06439295
Publishers Nova Science Publishers Inc, January 2012
Discusses the study of simulating the growth of a thin film by chemical vapour deposition (CVD) proc... Full description
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Discusses the study of simulating the growth of a thin film by chemical vapour deposition (CVD) processes. This title presents underlying hierarchy of models for low-temperature and low-pressure plasma in order to discuss the processes that can be used to implant or deposit thin layers of important materials.

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About the book

Full name Simulation of Deposition Processes with PECVD Apparatus
Author Meraa Arab
Language English
Binding Book - Hardback
Date of issue 2012
Number of pages 144
EAN 9781621003656
ISBN 9781621003656
Libristo code 06439295
Publishers Nova Science Publishers Inc
Weight 352
Dimensions 162 x 234 x 14

Categories

Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science
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